Стратнанотек
Стратнанотек
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  1. Equipment
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  3. SNT Vega
Equipment:

SNT Vega

Features

The vacuum magnetron sputtering SNT Vega (SNT-Vega vertical) equipment is a cost-effective solution for batch production. It stands out for high performance and uniformity of coating: the equipment allows to coat up to 65 substrates (60 * 48 mm) with a high ± 1% uniformity in batch. Oil-free pumping, ion-beam cleaning, resistance and temperature control, automated deposition process is a standard set of options for this type of equipment. Ion-beam spluttering, quartz control of coating thickness are options to choose.

Properties

System SNT Vega V
Deposition technology DC magnetron sputtering, RF Magnetron sputtering (optional), Ion-beam cleaning
Applied materials Any conductive material for DC (dielectric for RF), up to 4 materials in one deposition cycle
The vacuum chamber diameter, mm 600
System settings  
Pumping system High vacuum oil-free pumping
Ultimate vacuum, Pa 5 х10-4
Control of coatings Quartz control system or Resistive control system or Time control system 
Substrate holder Planar type
Heating IR
Coating thickness irregularity,    % ± 2.0
Distinctive features One-sided deposition, high performance

СТРАТНАНОТЕК
220070, Беларусь, г. Минск, ул. Радиальная, дом 54Б, офис 30
123317, Россия, г. Москва, наб.Пресненская , д.12, этаж 44, офис 4402, пом.9

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