The serial equipment SNT Ares is specially designed for the deposition of optical coatings with varying complexity. It can be configured for resistive, electron beam, laser deposition. The multilayer coatings control is carried out by single wavelength optical Monitoring method in real time, with the possibility of in-situ coating adjustment. Quartz thickness control can also be optionally installed. The machinery may be equipped with a carousel or a planetary type substrate holder depending on the uniformity requirements. The oil-free pumping and ion-beam cleaning device allow to produce pollution-free coating with high adhesion to the substrate. The possibility of using ion beam assisting allows to reduce the temperature of the deposition process for heat-sensitive substrates.
The entire product line is clean room ready.
|System||SNT Ares 350|
|Deposition technology||Electron-beam evaporation, resistive evaporation, magnetron sputtering (optional), ion-beam assisting (optional), ion-beam cleaning (optional)|
|Applied materials||Any commonly used material (dielectrics, metals, sulfides, fluorides)|
|Vacuum chamber diameter, mm||350|
|Pumping system||High vacuum oil-free pumping|
|Ultimate vacuum, Pa||1 х10-4|
|Control of coatings||Quartz control system, Optical control system (optional), Time control system (optional), Resistive control system (optional)|
|Substrate holder||Planar or dome type|
|Coating thickness irregularity, %||no more than ± 5|
|Distinctive features||Single-layer or multi-layer coatings deposition, clean room ready, loadlock optional|