SNT Ares is a compact vacuum loadlock system for batch production of complex precision optical coatings
System | SNT Ares 150 | SNT Ares 200 |
Deposition technology | Ion-beam sputtering (ring type ion source) with from four to six position target unit and charge neutralizer, DC magnetron sputtering (circular type, 3 pcs.) (optional), ion-beam cleaning, rf-plasma source (optional), ion-beam assisting (optional) | |
Applied materials | Any commonly used material, up to 4-6 materials in one deposition cycle | |
The diameter of the substrate holder, mm | 150 | 200 |
System settings | ||
Pumping system | High vacuum oil-free pumping | |
Ultimate vacuum, Pa | 2 х10-4 | |
Control coatings | Optical control system, Quartz control system (optional) | |
The substrate holder | Planar type | |
Heating | IR, HE | |
Coating thickness irregularity, % | up to ± 0.3 (depends on the diameter) | |
Distinctive features | Single-layer and multi-layer coatings, load lock |