The equipment of the linear single-pass type for the installation in a clean room.
The operation with a substrate or with the substrate holder is an option. The maximum size of utilized substrates is up to 300 * 300 mm. The automatic loader (SCARA) allows you to automate the operation of the equipment.
The loadlock provides a continuous process in the coating chamber, allowing you to achieve the performance of coating up to 1,5 m2 per hour.
The device is equipped with ion-beam substrate cleaning.
The possibility of sequential magnetron sputtering of up to 5 different materials has been achieved.
The compact size and simplicity of the changeover to another material contribute to low life cycle cost of the equipment.