The unique special purpose robotic complex for installation in clean room EFEM-equipment. Designed for fully automated processing of substrates with sizes up to 200x200 mm.
It is equipped with automated load ports to work with the 200 mm SMIF pod It allows to open the SMIF pod, remove substrates from the cassette using the robotic arm, and carry out the transfer of the substrates in the place of processing and back in the pod. The transfer of the substrates is carried out in a clean dust-free air environment.
It reads the identification number of SMIF-pod and the individual number of each substrate. It records the full story of the events for each substrate.
It is designed to meet the requirements of international SEMI standards for microelectronics.