The serial equipment SNT Libra is specially designed for the deposition of optical coatings with varying complexity. It can be configured for resistive, electron beam, laser deposition. The multilayer coatings control is carried out by single wavelength optical Monitoring method in real time, with the possibility of in-situ coating adjustment. Quartz thickness control can also be optionally installed. The machinery may be equipped with a carousel or a planetary type substrate holder depending on the uniformity requirements. The oil-free pumping and ion-beam cleaning device allow to produce pollution-free coating with high adhesion to the substrate. The possibility of using ion beam assisting allows to reduce the temperature of the deposition process for heat-sensitive substrates.
The entire product line is clean room ready.
|System||SNT Libra 700||SNT Libra 1100||SNT Libra 1500|
|Deposition technology||Electron-beam evaporation, resistive evaporation, ion-beam assisting (optional), ion-beam cleaning (optional)|
|Applied materials||Any commonly used material (dielectrics, metals, sulfides, fluorides)|
|Vacuum chamber diameter, mm||700||1100||1500|
|Pumping system||Forevacuum: dry pumps|
|A high-vacuum: turbomolecular pumps / cryogenic pumps|
|Ultimate vacuum, Pa||8 х10-5|
|Control of coatings||Optical control and / or quartz control|
|Substrate holder||Planetary or dome type|
|Coating thickness irregularity, less then %||± 1,5 - 2,5|
|Distinctive features||Single-layer or multi-layer coatings deposition|