Стратнанотек
Стратнанотек
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  3. SNT Taurus
Equipment:

SNT Taurus

Features

Modern version of classical equipment UVN-74 (УВН-74). Application – microelectronics.

 

Vacuum technological equipment SNT Taurus 74 is designed for single- and double-sided deposition of conductive or resistive layers. Proven deposition scheme allow using resistive and electronic (with an circular cathode) evaporation and magnetron sputtering. Taurus 74 is equipped with an ion-beam source for substrate cleaning and resistive control of deposition process. A quartz control system is an option of choice. The equipment can operate in automatic, semi-automatic and manual modes.

 

Properties

System SNT Taurus 74
Deposition technology Magnetron sputtering, Electron evaporation, Resistive evaporation, Ion-beam assisting (option) 
Substrate cleaning Ion-beam cleaning
Applied materials Metals, resistive compounds
System settings  
Pumping system High vacuum oil-free pumping
Ultimate vacuum, Pa 8 х10-5
Deposition control Quartz control or/and Resistive control and Time control 
Substrate size, mm 60х48; 30х24
Heating up to 350°С
Coating thickness irregularity, % no more than ± 5
Distinctive features One-sided or double-sided deposition

СТРАТНАНОТЕК
220070, Беларусь, г. Минск, ул. Радиальная, дом 54Б, офис 30
123317, Россия, г. Москва, наб.Пресненская , д.12, этаж 44, офис 4402, пом.9

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